CREAVAC-Creative
Vakuumbeschichtung GmbH
Löbtauer Straße 65-71
01159 Dresden
Telefon:
Fax:
E-Mail:
   (+49) 0351 - 21 838 - 0
(+49) 0351 - 21 838 - 19
info@creavac.de

Electron beam evaporation

Our CREAMET ® 900 E has a vertical chamber and up to two in-built electron beam evaporators. The wafer thickness uniformity is <0.5%, an active layer thickness sensor is integrated. Upon request, the
CREAMET ® 900 E can be equipped with etching or heating systems, sputter or arc evaporator. Our CREAMET ® 900 E is especially suitable for coating 3'' to 6'' wafers, for EMC coating and for the generation of optical layers.