Possible Use

Year of Construction

Chamber Size

1

• Vertical box coater with electron beam evaporation
• For R&D, lab tasks and sample coatings
• Chamber door
• Rotary drive for substrates which is placed on top of the system

1998 newly built, regenerated machine

Cubic chamber on base frame

900 mm x 900 mm x 900 mm

2

• Universal lab machine with 1 or 2 thermal evaporation systems  in standard configuration or remodelled with new vacuum pumps (rotary vane and turbo pump) and other new components  

1989 or earlier models

Ø 300, height 500 mm

Metal or glass cap

3

• Box coater system with swing door
• Electron evaporation system with 15 kW
• 4 times crucible
• Rotation unit/rotating plate for substrates

1990

cubic

ca. 650 mm x 570 mm x 690 mm

4

• Universal lab system with 1 or 2 thermal evaporation systems
• Option: with oscillating quartz layer thickness control unit
• Additionally equipped with new DC sputter source

1977, rarely used

Ø 370 mm, height 480 mm

Bell-shaped

5

• Box coater with cubic chamber
• For R&D and production processes
• Equipped with 2 sputter sources
• Rotary  vane, roots and cryo pump

1993

Ø 900 mm height

ca. 900 mm

on base frame

with rotating door

6

• Horizontal metallization system with two thermal evaporation systems
• Charger system with 2 rotating baskets for planet rotations
• Effective length on rotating cage: ca. 1500 mm
• Planets on rotating cage: 8 x Ø 450 mm or 16 x Ø 220 mm
• Options: with HMDS-system, with Polycold

1998

Partly with components made prior to 1998

Ø 1800 mm

Length 1700 mm

With sliding door in axial direction

7

• Horizontal metallization system with two thermal evaporation systems and charger system with 2 rotating baskets
• Planet rotation
• Effective length on rotating basket: ca. 1150 mm
• Planets on rotating basket: 8 x Ø 240 mm
• Options: with HMDS-system, with Polycold, layout for shielding

1998

Ø 1100

Length 1650 mm

With sliding door to the right

8

• Horizontal metallization system with one or two thermal evaporation systems
• 2 charger systems with rotating baskets for rotation planets
• Effective length ca. 1100 mm
• Planets on rotating basket: 8 x Ø 240 mm or 12 x Ø 170 mm
• Options: with HMDS-system for protection coating; with Polycold

1989/90 models according to availability

Ø 1000 mm

Length 400 mm

With swing door

9

• Horizontal metallization systems
• Has been used for jewellery coating
• Rotating planets possible

ca. 1970

refurbished with different components

System ready and operational

Ø 800

Effective length ca. 1000 mm

10

• Horizontal metallization system with one or two thermal evaporation systems
• 2 charger systems with rotating baskets for rotation planets
• Options: Polycold, HMDS-system

1989

Refurbished in 2004 including new control unit and evaporating unit

Ø 1900 mm

Length 2800 mm

Effective length ca. 2000 mm

11

• Horizontal metallization system with 1 thermal evaporation system
• Charger system with 2 rotating baskets for rotating planets

1973 u. 1984

Refurbished systems

Ø 900 mm

Length 1900 mm

Effective length on rotating basket ca. 1100

12

• Box-Coater-System Electron evaporation system 14 kW

ca. 1991

ca. 560 mm x 560 mm